摻鋁氧化鋅薄膜的光學性能研究
摘要:摻鋁氧化鋅（ZAO）是1種備受關注的新型透明導電薄膜材料。它的很多優點顯示，它是替代目前應用廣泛的In2O3∶Sn(ITO)薄膜的最佳薄膜材料。與In2O3∶Sn（ITO）薄膜相比，ZAO薄膜具有原材料的自然界儲量豐富、易於製造、成本低廉、無毒、熱穩定性和化學穩定性好等優點，因此，其必將成爲新1代透明導電氧化物薄膜的'代表。我們採用直流磁控濺射製備技術進行ZAO薄膜的製備實驗。用原子力顯微鏡、臺階儀、紫外-可見分光光度計、橢偏儀等測試手段對製備的樣品進行組織結構、光學分析。
從大量的製備ZAO薄膜實驗數據中，分析直流磁控濺射製備工藝參數對ZAO薄膜性能的影響，總結出最佳製備工藝參數: 靶基距爲7cm，沉積工作壓強保持爲0.5Pa,然後調節氧氬分壓比爲1%，加熱玻璃基片到200 oC，以150W左右的濺射功率進行直流反應磁控濺射15min左右，最後在真空環境中退火處理1小時，退火溫度爲200oC。在最佳工藝條件下製備出的ZAO薄膜的主要性能爲:膜厚在600nm左右，可見光區平均透射率爲89.2%，光學性能能滿足使用的需求。
本論文主要從薄膜的結構、光學特性變化的機理入手，爲進1步全面研究ZAO薄膜的製備、結構特性、光學特性打下了堅實的基礎，也對ZAO薄膜的實際應用具有積極意義。
關鍵詞：ZAO薄膜，直流磁控濺射，可見光透射率，光學性能
The Al-doped ZnO(ZAO) thin film optical properties research
Abstract : Aluminum-doped zinc oxide (ZAO) is a new area of concern transparent conductive film. Its many advantages, it is a replacement of the current widespread use of In2O3∶Sn (ITO) films the best film material. And In2O3∶Sn (ITO) film, the film is ZAO raw materials rich in natural reserves, easy to manufacture, low-cost, nontoxic, thermal stability and good chemical stability advantages, therefore, will be the next generation of its transparent conductive oxide films representatives. We dc magnetron sputtering technique ZAO Films Preparation. Atomic force microscope, level sensor, UV-VIS spectrophotometer, ellipsometer, and other means of testing the sample preparation organizational structure, Optical analysis. Preparation from a large number of experimental data ZAO films, Analysis of DC magnetron sputtering process parameters on the performance of ZAO films, summed up best Preparation of parameters : target-substrate distance of 7 cm, sedimentary work to maintain the pressure for 0.5 Pa, and then adjusted partial pressure of oxygen and argon ratio of 1%. glass substrate heating to200oC. to about 150 W power for the sputtering DC reactive magnetron sputtering about 15 min. Finally in a vacuum environment annealing an hour, annealing temperature of200oC. In optimum conditions produced a film ZAO the main properties : 600 nm in thickness around, visible average transmission rate of 89.2%, optical properties can satisfy the demand. This paper mainly from the films structure, changes in the optical properties of the mechanism for further comprehensive study of ZAO Films Preparation, structural properties, optical properties lay a solid foundation for ZAO Films practical application of positive significance.
Keywords : ZAO film, DC magnetron sputtering, visible light transmittance, optical properties
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